| 1. | Please give me the tpc and trimming table 请把百吨吃水变化表给我。 |
| 2. | The laser trim table's long interval of change-line can decrease system's efficiency 光刻平台换行时间较长会影响整机的光刻效率。 |
| 3. | Furthermore, this paper put forward a on-line adjust method to aim at the initialize position from laser trim table to optical system, this method simplify the adjust work 实现了一种光刻平台与光学系统的在线对光路功能,简化了光刻平台与光学系统的光路对准调整工作。 |
| 4. | Moreover, in order to improve laser trim table's position accuracy, it reduces laser trim table's position error through the method of slope correction 为了提高光刻平台的定位精度,通过在控制中采用斜率校正法,减小了光刻平台的定位误差,解决了光刻平台的定位精度问题。 |
| 5. | Moreover, in order to improve laser trim table's position accuracy, it reduces laser trim table's position error through the method of slope correction 为了提高光刻平台的定位精度,通过在控制中采用斜率校正法,减小了光刻平台的定位误差,解决了光刻平台的定位精度问题。 |
| 6. | At the same time, this paper also introduces communication way combined ether net with parallel port . it realized the data translating and synchronization between computer and laser trim table system 采用以太网与并口结合的通讯方式,实现了上位机与光刻平台系统的数据传递与同步。 |
| 7. | In order to resolves this problem, this paper put forward a parallel way of laser trim table with measure stitches, realized laser trim table's high speed change-line 针对这个问题,提出了一种光刻平台与测量探针组的并行工作方式,实现了光刻平台的高速换行,解决了光刻平台的速度问题。 |
| 8. | In order to resolves this problem, this paper put forward a parallel way of laser trim table with measure stitches, realized laser trim table's high speed change-line 针对这个问题,提出了一种光刻平台与测量探针组的并行工作方式,实现了光刻平台的高速换行,解决了光刻平台的速度问题。 |
| 9. | Through designs and developments the laser trim table system automatic control program, the system realized automatic provide resistors, check resistors, set resistors, change resistors and collect resistors functions, and realized automatic work progress 设计编写了全部光刻平台系统自动控制程序和人机交互程序,使其具有全自动上片、检片、装片、换片、光刻、收片功能,实现了激光调阻机的全自动光刻过程。 |
| 10. | Secondly, it states the control principle of the new linear motor which drives the laser trim table . through adjusting proportion gain and integrated gain repeatedly, and the combination with the dynamic curve of laser trim table, it improves laser trim table's response 研究了带动光刻平台的新型直线电机控制原理,通过反复调整比例、积分等一系列伺服控制参数,并结合光刻平台阶跃动态曲线,提高了光刻平台的响应性。 |